Häusler G, Less J H, Maul M, Weissmann H
Appl Opt. 1988 Nov 15;27(22):4638-44. doi: 10.1364/AO.27.004638.
We report an optical range sensor that combines the advantages of focus sensing and interferometry. It works for specularly reflecting objects and for diffusely reflecting objects. The sensor is simple, robust against vibrations, and has high depth resolution. The aperture is very small, hence the sensor is small and minimizes shading problems. The sensor is based on the following principle: A light spot is projected onto the object under test. The radius of the wave that is scattered at the object is measured with high accuracy by shearing interferometry.
我们报道了一种结合了焦点传感和干涉测量优点的光学距离传感器。它适用于镜面反射物体和漫反射物体。该传感器结构简单，抗振动能力强，且具有高深度分辨率。其孔径非常小，因此传感器体积小，可将阴影问题降至最低。该传感器基于以下原理：将一个光斑投射到被测物体上。通过剪切干涉测量法高精度测量在物体上散射的波的半径。
