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基于相干雷达的粗糙表面三维传感

Three-dimensional sensing of rough surfaces by coherence radar.

作者信息

Dresel T, Häusler G, Venzke H

出版信息

Appl Opt. 1992 Mar 1;31(7):919-25. doi: 10.1364/AO.31.000919.

DOI:10.1364/AO.31.000919
PMID:20720701
Abstract

We introduce a three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface. This differs from conventional optical systems in which the depth accuracy is limited by the aperture. Consequently, our sensor supplies high accuracy with a small aperture, i.e., we can probe narrow crevices and holes. The sensor is based on a Michelson interferometer, with the rough object surface serving as one mirror. The small coherence length of the light source is used. While scanning the object in depth, one can detect the local occurrence of interference within the speckles emerging from the object. We call this method coherence radar.

摘要

我们介绍一种主要为粗糙物体设计的三维传感器,其提供的精度仅受物体表面粗糙度的限制。这与传统光学系统不同,在传统光学系统中深度精度受孔径限制。因此,我们的传感器在小孔径情况下就能提供高精度,也就是说,我们能够探测狭窄的缝隙和孔洞。该传感器基于迈克尔逊干涉仪,粗糙的物体表面充当其中一面镜子。使用了光源的小相干长度。在对物体进行深度扫描时,可以检测从物体产生的散斑内局部干涉的出现情况。我们将这种方法称为相干雷达。

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