Intensity calibration of an EUV polarizer spectrometer detector system.

The absolute transmission and polarization of a polarizer and a Seya-Namioka monochromator are measured in the 50-120-nm wavelength range using spectrally dispersed synchrotron radiation. Grating illumination, astigmatism, and higher-order diffraction are taken into account. The efficiency of a channel electron multiplier is determined relative to a NBS calibrated A1(2)O(3) photodiode. The instruments are studied separately. The results are compared to other experimental and theoretical data where possible.