National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, Anhui 230029, China.
Opt Lett. 2011 Jan 15;36(2):163-5. doi: 10.1364/OL.36.000163.
A broadband SiC/W/Ir multilayer coating was deposited onto a diffraction grating to enhance the grating efficiency in the 50-100 nm wavelength range in a Seya-Namioka mount. The holographic ion-beam etched grating had a laminar profile with 1200 lines/mm. The coating was designed by using the subquarterwave multilayer theory. The measurement results show that the efficiency in the -1st diffraction order is greater than 9.3% throughout the wavelength range of 50-100 nm, which is obviously higher than that of single-layer gratings with SiC, Ir, or Au coatings.
在硒化锌基底上，通过离子束刻蚀技术制作了具有 1200 线/mm 线密度的闪耀光栅，并在其表面镀制了SiC/W/Ir多层膜宽带增透膜，以提高其在 50-100nm 波段的衍射效率。该多层膜采用了 subquarterwave 多层膜设计理论，通过优化设计得到了在 50-100nm 波段平均反射率低于 1%、峰值反射率低于 3%的宽带增透膜。实验结果表明，在 50-100nm 波段范围内，-1 级衍射效率大于 9.3%，与单层膜 SiC、Ir 和 Au 相比有了明显的提高。
