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极薄膜的光学性质:使用衰减全反射技术的研究

Optical properties of extremely thin films: studies using ATR techniques.

作者信息

Xu J J, Tang J F

出版信息

Appl Opt. 1989 Jul 15;28(14):2925-8. doi: 10.1364/AO.28.002925.

Abstract

The optical constants and optical properties of extremely thin ZnS, SiO(2), Al, and Ag films are studied and compared by attenuated total reflection (ATR) techniques. The optical constants and optical absorptance as a function of film thickness are measured. The experimental results agree well with theoretical prediction. It is found that there is no discontinuity in optical constants and absorptance when an extremely thin layer changes from isolated islands to a continuous film for all the measured materials. The critical thicknesses at which they form continuous films show great differences for the various materials and deposition methods. The dependence of absorptance on thickness of extremely thin layers is studied experimentally and theoretically.

摘要

通过衰减全反射(ATR)技术研究并比较了极薄的硫化锌(ZnS)、二氧化硅(SiO₂)、铝(Al)和银(Ag)薄膜的光学常数和光学性质。测量了作为薄膜厚度函数的光学常数和光吸收率。实验结果与理论预测吻合良好。研究发现,对于所有被测材料,当极薄的一层从孤立岛状变为连续薄膜时,光学常数和吸收率并无间断。它们形成连续薄膜的临界厚度因材料和沉积方法的不同而有很大差异。从实验和理论两方面研究了极薄薄膜的吸收率对厚度的依赖性。

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