Gupta M C, Strasser T, Bellman R
Appl Opt. 1990 May 20;29(15):2307-10. doi: 10.1364/AO.29.002307.
Corning 7059 glass thin film waveguides prepared by rf sputtering and vapor deposition were annealed with a CO(2) laser at various powers and scan velocities. Some reduction in optical loss was observed after laser annealing of the films. The results show a reduction in optical loss with the number of laser scans. Optical profilometer measurements indicated no change in surface roughness after laser annealing. RBS analysis of laser annealed samples show no change in elemental composition. We discuss possible optical loss reduction mechanisms and present data on the marking of thin films when annealing is done at higher CO(2) laser powers.
通过射频溅射和气相沉积制备的康宁7059玻璃薄膜波导，用二氧化碳激光以不同功率和扫描速度进行退火处理。薄膜经激光退火后，观察到光损耗有所降低。结果表明，光损耗随着激光扫描次数的增加而降低。光学轮廓仪测量表明，激光退火后表面粗糙度没有变化。对激光退火样品的卢瑟福背散射分析表明，元素组成没有变化。我们讨论了可能的光损耗降低机制，并给出了在较高二氧化碳激光功率下进行退火时薄膜标记的数据。
