Okada K, Sakuta H, Ose T, Tsujiuchi J
Appl Opt. 1990 Aug 1;29(22):3280-5. doi: 10.1364/AO.29.003280.
A phase shifting interferometer using a tunable laser as a light source is proposed for measuring shapes of both surfaces of a glass plate and the distribution of refractive index. To separate the superimposed interferograms generated with many wavefronts reflected from the plate, the phase shift associated with the wavelength shift is applied in the phase shifting interferometer with unequal optical paths in testing and reference beams. A laser diode is used for the tunable light source, and the data processing for obtaining phase distribution is based on the least-squares fitting in interferograms. The rms errors of the measurements are <1/50 wavelength for the surface shape, and 10(-5) of the refractive index for a 5-mm thick optical glass plate.
提出了一种使用可调谐激光器作为光源的相移干涉仪，用于测量玻璃板两个表面的形状和折射率分布。为了分离由玻璃板反射的多个波前产生的叠加干涉图，在测试光束和参考光束光程不等的相移干涉仪中应用与波长偏移相关的相移。采用激光二极管作为可调谐光源，基于干涉图的最小二乘拟合进行获取相位分布的数据处理。对于5毫米厚的光学玻璃板，表面形状测量的均方根误差小于1/50波长，折射率测量的均方根误差为10^(-5) 。
