Lohmann A W, Thomas J A
Appl Opt. 1990 Oct 10;29(29):4337-40. doi: 10.1364/AO.29.004337.
Binary phase elements in photoresist have been implemented which transform a uniform beam of light into an array of output light spots by means of the fractional Talbot effect. Arrays of more than 30 x 30 light spots with varying spot shapes have been achieved with compression ratios of up to 1:9.
光刻胶中的二元相位元件已被实现,其通过分数塔尔博特效应将均匀光束转换为输出光斑阵列。已实现了超过30×30个具有不同光斑形状的光斑阵列,压缩比高达1:9。