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亚波长尺度下的导体间隙硅等离子体波导及无源元件。

Conductor-gap-silicon plasmonic waveguides and passive components at subwavelength scale.

作者信息

Wu Marcelo, Han Zhanghua, Van Vien

机构信息

Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, T6G 2V4, Canada.

出版信息

Opt Express. 2010 May 24;18(11):11728-36. doi: 10.1364/OE.18.011728.

Abstract

Subwavelength conductor-gap-silicon plasmonic waveguides along with compact S-bends and Y-splitters were theoretically investigated and experimentally demonstrated on a silicon-on-insulator platform. A thin SiO2 gap between the conductor layer and silicon core provides subwavelength confinement of light while a long propagation length of 40 microm was achieved. Coupling of light between the plasmonic and conventional silicon photonic waveguides was also demonstrated with a high efficiency of 80%. The compact sizes, low loss operation, efficient input/output coupling, combined with a CMOS-compatible fabrication process, make these conductor-gap-silicon plasmonic devices a promising platform for realizing densely-integrated plasmonic circuits.

摘要

在绝缘体上硅平台上,对具有紧凑S形弯曲和Y形分支的亚波长导体-间隙-硅等离子体波导进行了理论研究和实验验证。导体层和硅芯之间的薄SiO₂间隙提供了光的亚波长限制,同时实现了40微米的长传播长度。还展示了等离子体波导与传统硅光子波导之间的高效光耦合,耦合效率高达80%。这些紧凑的尺寸、低损耗运行、高效的输入/输出耦合,再加上与CMOS兼容的制造工艺,使这些导体-间隙-硅等离子体器件成为实现密集集成等离子体电路的有前景的平台。

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