Wu Marcelo, Han Zhanghua, Van Vien
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, T6G 2V4, Canada.
Opt Express. 2010 May 24;18(11):11728-36. doi: 10.1364/OE.18.011728.
Subwavelength conductor-gap-silicon plasmonic waveguides along with compact S-bends and Y-splitters were theoretically investigated and experimentally demonstrated on a silicon-on-insulator platform. A thin SiO2 gap between the conductor layer and silicon core provides subwavelength confinement of light while a long propagation length of 40 microm was achieved. Coupling of light between the plasmonic and conventional silicon photonic waveguides was also demonstrated with a high efficiency of 80%. The compact sizes, low loss operation, efficient input/output coupling, combined with a CMOS-compatible fabrication process, make these conductor-gap-silicon plasmonic devices a promising platform for realizing densely-integrated plasmonic circuits.
在绝缘体上硅平台上,对具有紧凑S形弯曲和Y形分支的亚波长导体-间隙-硅等离子体波导进行了理论研究和实验验证。导体层和硅芯之间的薄SiO₂间隙提供了光的亚波长限制,同时实现了40微米的长传播长度。还展示了等离子体波导与传统硅光子波导之间的高效光耦合,耦合效率高达80%。这些紧凑的尺寸、低损耗运行、高效的输入/输出耦合,再加上与CMOS兼容的制造工艺,使这些导体-间隙-硅等离子体器件成为实现密集集成等离子体电路的有前景的平台。