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基于傅里叶模态方法的金属二元光栅散射的可靠计算。

Reliable computation of scattering from metallic binary gratings using Fourier-based modal methods.

作者信息

Gundu Krishna Mohan, Mafi Arash

机构信息

Department of Electrical Engineering and Computer Science, University of Wisconsin-Milwaukee,3200 N. Cramer St., Milwaukee, Wisconsin 53211, USA.

出版信息

J Opt Soc Am A Opt Image Sci Vis. 2010 Jul 1;27(7):1694-700. doi: 10.1364/JOSAA.27.001694.

Abstract

Convergence problems in modal methods for TM polarized fields are often attributed to the inaccuracies in computing the modes of a grating. We report that even in the absence of these inaccuracies convergence problems persist. These arise because of the truncation of the infinite set of linear equations resulting from matching the fields at the grating-substrate and grating-superstrate interfaces with a square matrix. We show that dramatic improvement in convergence can be achieved if the infinite set of linear equations is truncated with a rectangular matrix and by seeking a solution with minimum least squared error.

摘要

用于TM偏振场的模态方法中的收敛问题通常归因于计算光栅模式时的不准确性。我们报告称,即使不存在这些不准确性,收敛问题仍然存在。这些问题的出现是由于用方阵匹配光栅-衬底和光栅-覆盖层界面处的场时产生的无限线性方程组被截断。我们表明,如果用矩形矩阵截断无限线性方程组并寻求最小二乘误差最小的解,收敛性可以得到显著改善。

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