Department of Electronic Engineering, Kwangwoon University, Nowon-gu Seoul, 139-701, South Korea.
Nanoscale Res Lett. 2009 Nov 15;5(2):308-14. doi: 10.1007/s11671-009-9481-9.
We report on various self-assembled In(Ga)As nanostructures by droplet epitaxy on GaAs substrates using molecular beam epitaxy. Depending on the growth condition and index of surfaces, various nanostructures can be fabricated: quantum dots (QDs), ring-like and holed-triangular nanostructures. At near room temperatures, by limiting surface diffusion of adatoms, the size of In droplets suitable for quantum confinement can be fabricated and thus InAs QDs are demonstrated on GaAs (100) surface. On the other hand, at relatively higher substrate temperatures, by enhancing the surface migrations of In adatoms, super lower density of InGaAs ring-shaped nanostructures can be fabricated on GaAs (100). Under an identical growth condition, holed-triangular InGaAs nanostructures can be fabricated on GaAs type-A surfaces, while ring-shaped nanostructures are formed on GaAs (100). The formation mechanism of various nanostructures can be understood in terms of intermixing, surface diffusion, and surface reconstruction.
我们通过分子束外延在 GaAs 衬底上的液滴外延报告了各种自组装的 In(Ga)As 纳米结构。根据生长条件和表面指数的不同,可以制备出各种纳米结构:量子点(QD)、环状和孔三角纳米结构。在接近室温的条件下,通过限制吸附原子的表面扩散,可以制备出适合量子限制的 In 液滴的尺寸,从而在 GaAs(100)表面上演示了 InAs QD。另一方面,在相对较高的衬底温度下,通过增强 In adatoms 的表面迁移,可以在 GaAs(100)上制备出超低密度的 InGaAs 环状纳米结构。在相同的生长条件下,在 GaAs 型-A 表面上可以制备出孔三角 InGaAs 纳米结构,而在 GaAs(100)上形成环状纳米结构。可以根据混和、表面扩散和表面重构来理解各种纳米结构的形成机制。