基于氧化锌纳米棒阵列的高灵敏度化学传感器的制备

Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays.

作者信息

Park Jae Young, Choi Sun-Woo, Kim Sang Sub

机构信息

School of Materials Science and Engineering, Inha University, Incheon, 402-751 Korea.

出版信息

Nanoscale Res Lett. 2009 Nov 18;5(2):353-359. doi: 10.1007/s11671-009-9487-3.

DOI:10.1007/s11671-009-9487-3

PMID:20672125

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC2893860/

Abstract

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top-top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.

摘要

我们报道了一种基于氧化锌纳米棒阵列制造高灵敏度化学传感器的新方法，该阵列在涂有铂的硅衬底上外延生长，采用顶-顶电极配置。为了实际测试该器件，研究了其对氧气和二氧化氮的传感特性。这类器件的气敏特性表明，该方法在制造灵敏可靠的纳米棒化学传感器方面具有广阔前景。