ACS Appl Mater Interfaces. 2010 Aug;2(8):2193-7. doi: 10.1021/am100512c.
A simple and novel method to fabricate and miniaturize surface and subsurface microstructures and micropatterns in glassy carbon is proposed and demonstrated. An aqueous resorcinol-formaldehyde (RF) sol is employed for micromolding of the master pattern to be replicated, followed by controlled drying and pyrolysis of the gel to reproduce an isotropically shrunk replica in carbon. The miniaturized version of the master pattern thus replicated in carbon is about 1 order of magnitude smaller than original master by repeating three times the above cycle of molding and drying. The microfabrication method proposed will greatly enhance the toolbox for a facile fabrication of a variety of carbon-MEMS and C-microfluidic devices.
提出并证明了一种在玻璃碳中制造和微型化表面和亚表面微结构和微图案的简单新颖方法。采用水合间苯二酚-甲醛（RF）溶胶对要复制的主图案进行微成型，然后控制凝胶的干燥和热解，以在碳中复制各向同性收缩的复制品。通过重复上述三次成型和干燥循环，在碳中复制的主图案的小型化版本比原始主图案小约 1 个数量级。所提出的微制造方法将极大地增强各种碳-MEMS 和 C-微流控器件的简易制造工具包。
