Walker S J, Jahns J, Li L, Mansfield W M, Mulgrew P, Tennant D M, Roberts C W, West L C, Ailawadi N K
Appl Opt. 1993 May 10;32(14):2494-501. doi: 10.1364/AO.32.002494.
High-frequency gratings with rectangular-groove profiles are used to generate high-efficiency beam splitters and beam deflectors. The effects of the grating design parameters, i.e., period, groove depth, duty cycle, number of phase levels, and polarization state (TE and TM) of the incoming signal, are considered. The case of the binary beam splitter grating is analyzed by using rigorous electromagnetic grating analysis. Fabrication techniques are presented in which three different lithographic techniques are considered (optical contact, deep-UV stepper reduction, and electron-beam direct write). Experimental results of 97% efficiency for the beam splitter grating and up to 80% for the beam deflector grating are reported.
具有矩形槽轮廓的高频光栅用于生成高效光束分离器和光束偏转器。考虑了光栅设计参数的影响，即周期、槽深、占空比、相位级数以及入射信号的偏振态（TE和TM）。通过严格的电磁光栅分析对二元光束分离器光栅的情况进行了分析。介绍了制造技术，其中考虑了三种不同的光刻技术（光学接触、深紫外步进光刻和电子束直写）。报告了光束分离器光栅97%的效率以及光束偏转器光栅高达80%的实验结果。
