用于高效扇出元件的优化相息图结构。

Optimized kinoform structures for highly efficient fan-out elements.

作者信息

Prongué D, Herzig H P, Dändliker R, Gale M T

出版信息

Appl Opt. 1992 Sep 10;31(26):5706-11. doi: 10.1364/AO.31.005706.

DOI:10.1364/AO.31.005706

PMID:20733756

Abstract

We discuss the realization of highly efficient fan-out elements. Laser-beam writing lithography is available now for fabricating smooth surface relief microstructures. We develop several methods for optimizing microstructure profiles. Only a small number of parameters in the object plane are necessary for determining the kinoform. This simplifies the calculation of M x N arrays also for large M and N. Experimental results for a 9-beam fan-out element are presented.

摘要

我们讨论了高效扇出元件的实现。激光束直写光刻技术目前可用于制造表面光滑的微结构。我们开发了几种优化微结构轮廓的方法。确定相息图仅需要物平面中的少量参数。这也简化了大M和N情况下M×N阵列的计算。文中给出了九光束扇出元件的实验结果。