Huang P S, Kiyono S, Kamada O
Appl Opt. 1992 Oct 1;31(28):6047-55. doi: 10.1364/AO.31.006047.
We describe a new method of angle measurement that is based on the internal-reflection effect at an air-glass boundary. The method uses a differential detection scheme to largely reduce the inherent nonlinearity of the reflectance versus the angle of incidence in internal reflection. With nonlinearity reduced, the displacement of the angle of incidence can be determined accurately by measuring the reflectance. The resolution and measurement range are determined by the initial angle of incidence, the polarization state of the light, and the number of reflections. Compared with interferometers and autocollimators, this method has the advantage of a simple sensor design for applications ranging from a wide measurement range to extremely high resolution. Other advantages are compact size, simple structure, and low cost. A theoretical analysis of the method and some experimental results of a prototype sensor are presented. The possible applications of the method are also discussed.
我们描述了一种基于空气-玻璃界面内反射效应的角度测量新方法。该方法采用差分检测方案,以大幅降低内反射中反射率与入射角之间固有的非线性。随着非线性的降低,可以通过测量反射率准确确定入射角的位移。分辨率和测量范围由入射角的初始角度、光的偏振态以及反射次数决定。与干涉仪和自准直仪相比,该方法具有传感器设计简单的优点,适用于从宽测量范围到极高分辨率的各种应用。其他优点包括尺寸紧凑、结构简单和成本低。本文给出了该方法的理论分析以及原型传感器的一些实验结果。还讨论了该方法的可能应用。