Bozhevolnaya E A, Bozhevolnyi S I, Postnikov A V
Appl Opt. 1992 Nov 10;31(32):6836-9. doi: 10.1364/AO.31.006836.
A computer-aided differential amplitude scanning optical microscope for accurate linewidth measurements is described. The operation of the system includes an experimental data treatment based on the correspondent image formation theory. Experimental results for a three-track structure are presented. The developed technique is shown to be capable of measuring submicrometer linewidths with nanometer accuracy.
