Advanced Materials for Micro- and Nano-Systems Program, Singapore-MIT Alliance, Singapore.
Nanotechnology. 2010 Sep 24;21(38):385303. doi: 10.1088/0957-4484/21/38/385303. Epub 2010 Aug 26.
A method to create an array of sub-5 nm nanogaps with self-aligned holes in a protective polymer overlayer is presented. The parallel formation of the nanogaps, intended for electrical sensing of biomolecules in an aqueous environment, is achieved by electromigration using a simple voltage ramp across parallel-connected electrode patterns with individual constrictions. It was observed that the nanogap always formed on the cathode side of a bowtie electrode, with corresponding hillocks on the anode side, with the distance of the gap/hillock formation from the constriction depending on the ambient temperature. This technique provides a practical means to fabricate a series of polymer-protected nanogaps with considerably higher efficiency than afforded by the normally slow serial process of electromigration.
本文提出了一种在保护聚合物覆盖层中形成亚 5nm 纳米间隙阵列的方法，其中具有自对准孔。通过使用简单的电压斜坡在具有单独限制的并联电极图案之间进行电迁移，实现了纳米间隙的平行形成，目的是在水环境中对生物分子进行电感应。观察到纳米间隙总是在蝶形电极的阴极侧形成，在阳极侧相应地形成凸起，间隙/凸起形成的距离与环境温度有关。该技术提供了一种实用的方法来制造一系列聚合物保护的纳米间隙，其效率明显高于通常较慢的电迁移串行过程。
