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基于激光偏转测量法的球面轮廓检测

Profile testing of spherical surfaces by laser deflectometry.

作者信息

Rosete-Aguilar M, Díaz-Uribe R

出版信息

Appl Opt. 1993 Sep 1;32(25):4690-7. doi: 10.1364/AO.32.004690.

Abstract

A method for testing the profiles of spherical surfaces is presented. It consists of measuring the transversal deflection of a reflected He-Ne laser beam when the surface is rotated around an axis located near its center of curvature. A set of formulas that enables us to calculate the shape of the profile as well as the decentering of the rotation axis is obtained. By using a simple experimental setup, we found the differences between the experimental profile with respect to the ideal one; the accuracy that was obtained is ~3 µm. The method may be improved and is useful for convex as well as for concave surfaces. With minor modifications it is possible to test large surfaces and weak aspherics.

摘要

提出了一种检测球面轮廓的方法。该方法包括当表面绕位于其曲率中心附近的轴旋转时,测量反射的氦氖激光束的横向偏转。得到了一组公式,可用于计算轮廓形状以及旋转轴的偏心距。通过使用简单的实验装置,我们发现了实验轮廓与理想轮廓之间的差异;获得的精度约为3 µm。该方法可以改进,对凸面和凹面都有用。只需进行微小修改,就可以检测大表面和弱非球面。

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