Zhang Tianhua, Gong Zhongcheng, Giorno Rebecca, Que Long
Institute for Micromanufacturing, Louisiana Tech University, Ruston, Louisiana 71272, USA.
Opt Express. 2010 Sep 13;18(19):20282-8. doi: 10.1364/OE.18.020282.
A polymer-based micromachined Fabry-Perot interferometer (µFPI) with embedded nanostructures in its cavity, called nanostructured-FPI, is reported. The nanostructures inside the cavity are a layer of Au-coated nanopores. As a refractive-index sensitive optical sensor, it offers the following advantages over a traditional µFPI for label-free biosensing applications, including increased sensing surface area, extended penetration depth of the excitation light and amplified optical transducing signals. For a nanostructured-FPI with nanopore size of 50 nm in diameter and the gap size of FPI cavity of 50 µm, measurements find that it has ~20 times improvement in free spectral range (FSR), ~2 times improvement in finesse and ~4 times improvement in contrast of optical transducing signals over a traditional µFPI even without any device performance optimization. Several chemicals have also been evaluated using this device. Fourier transform has been performed on the measured optical signals to facilitate the analysis of the transducing signals.
报道了一种基于聚合物的微机械加工法布里-珀罗干涉仪（µFPI），其腔体内嵌入了纳米结构，称为纳米结构FPI。腔体内的纳米结构是一层镀有金的纳米孔。作为一种对折射率敏感的光学传感器，与传统的µFPI相比，它在无标记生物传感应用中具有以下优势，包括增加传感表面积、扩展激发光的穿透深度以及放大光学传感信号。对于纳米孔直径为50 nm且FPI腔间隙尺寸为50 µm的纳米结构FPI，测量发现，即使在没有任何器件性能优化的情况下，其自由光谱范围（FSR）比传统µFPI提高了约20倍，精细度提高了约2倍，光学传感信号对比度提高了约4倍。还使用该器件对几种化学物质进行了评估。已对测量的光信号进行傅里叶变换，以方便对传感信号进行分析。
