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通过散斑相关法进行表面粗糙度的全场测定。

Whole-field determination of surface roughness by speckle correlation.

作者信息

Tay C J, Toh S L, Shang H M, Zhang J

出版信息

Appl Opt. 1995 May 1;34(13):2324-35. doi: 10.1364/AO.34.002324.

DOI:10.1364/AO.34.002324
PMID:21037784
Abstract

A whole-field method of double-exposure speckle photography is employed to determine metal surface roughness by correlation between two speckle patterns. A movable rectangular aperture that is mounted before an image lens is shifted between the exposures, which results in a decrease in the contrast of the reconstructed Young's fringes with increasing roughness. The technique permits evaluation of the roughness of particular points on a surface as well as the average roughness of an entire surface. Four sets of random surfaces that were prepared by different machine-finishing processes and with roughnesses ranging from 0.6 to 13 µm have been tested. Different methods have been carried out to process the test data, and a practical method for the evaluation of surface roughness is proposed.

摘要

采用双曝光散斑摄影全场法,通过两个散斑图案之间的相关性来测定金属表面粗糙度。安装在成像透镜前的可移动矩形光阑在两次曝光之间移动,这导致随着粗糙度增加,重建的杨氏条纹对比度降低。该技术可评估表面特定点的粗糙度以及整个表面的平均粗糙度。对通过不同机械加工工艺制备的四组随机表面进行了测试,其粗糙度范围为0.6至13 µm。采用了不同方法处理测试数据,并提出了一种评估表面粗糙度的实用方法。

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