Melozzi M, Pezzati L, Mazzoni A
Appl Opt. 1995 Sep 1;34(25):5595-601. doi: 10.1364/AO.34.005595.
We have realized a digital Twyman-Green interferometer to measure the quality of optical surfaces in unstable environments. The system yields accurate measurements even in the presence of severe mechanical vibrations. The interferograms are decoded by application of a spatial-carrier phase-shifting fringe-analysis technique. The interferometer was mounted over a production machine and used for on-line measurements of aspheric mirror surfaces during the figuring and polishing process.
我们实现了一种数字泰曼-格林干涉仪，用于在不稳定环境中测量光学表面的质量。即使在存在严重机械振动的情况下，该系统也能产生准确的测量结果。通过应用空间载波相移条纹分析技术对干涉图进行解码。该干涉仪安装在一台生产机器上，用于在非球面镜的研磨和抛光过程中进行在线测量。
