Hao Qun, Ning Yan, Hu Yao, Zhang Yu, Tao Xin, Chang Xu
Appl Opt. 2021 Feb 20;60(6):1550-1557. doi: 10.1364/AO.414810.
A simultaneous phase-shifting interferometer with a monitored spatial light modulator (SLM) flexible reference mirror is proposed to balance the flexibility and accuracy of aspheric-surface in-process measurements. In this method, polarization simultaneous phase-shifting camera systems are applied to reduce the influence of environmental vibrations on the in-process measurements. An SLM reference mirror is employed to improve the flexibility of in-process measurements. A device is integrated to monitor the SLM surface in order to improve measurement accuracy caused by the spatial phase nonuniformity and modulation instability of the SLM. Thus, the SLM surface is monitored and the aspheric surface is measured simultaneously in only one interferometer, which presents the advantages of a compact structure and simple calibration. A flat acrylic mirror with an unknown surface figure error is measured by the proposed interferometer. Cross tests demonstrate the feasibility of this interferometer.
提出了一种带有受监测空间光调制器（SLM）柔性参考镜的同步相移干涉仪，以平衡非球面表面在线测量的灵活性和精度。在该方法中，采用偏振同步相移相机系统来减少环境振动对在线测量的影响。采用SLM参考镜来提高在线测量的灵活性。集成了一种装置来监测SLM表面，以提高由SLM的空间相位不均匀性和调制不稳定性引起的测量精度。因此，仅在一台干涉仪中就可以同时监测SLM表面并测量非球面表面，这具有结构紧凑和校准简单的优点。使用所提出的干涉仪测量了具有未知表面形状误差的平面丙烯酸镜。交叉测试证明了该干涉仪的可行性。
