Seely J F, Kowalski M P, Hunter W R, Barbee T W, Cruddace R G, Rife J C
Appl Opt. 1995 Oct 1;34(28):6453-8. doi: 10.1364/AO.34.006453.
Multilayer and gold coatings were applied to replicas of the 3600-line/mm ruled grating that was developed for the Naval Research Laboratory S082A spectroheliograph that was flown on the Skylab spacecraft. The Mo-Si multilayer coating had a peak normal-incidence reflectance of 50% at a wavelength of 136 Å. The normal-incidence efficiency of the multilayer-coated grating was measured by the use of synchrotron radiation and was compared with the efficiency of the gold-coated replica grating in the 115-340-Å wavelength region. The peak efficiency of the multilayer grating was 1.3% in the 133-137-Å region and was a factor of 65 higher than the efficiency of the gold grating. The multilayer and gold coated gratings, as well as an uncoated replica grating substrate, were characterized by the use of a scanning probe microscope. The rms microroughness of the uncoated and multilayer-coated gratings was 10 Å, and the microroughness of the gold grating was 16 Å.
多层膜和金涂层被应用于为海军研究实验室S082A太阳单色光照相仪研制的3600线/毫米刻线光栅的复制品上，该太阳单色光照相仪搭载在天空实验室航天器上。钼硅多层膜涂层在波长136 Å处的垂直入射峰值反射率为50%。利用同步辐射测量了多层膜涂层光栅的垂直入射效率，并在115 - 340 Å波长区域内与金涂层复制品光栅的效率进行了比较。多层膜光栅在133 - 137 Å区域的峰值效率为1.3%，比金光栅的效率高65倍。通过使用扫描探针显微镜对多层膜和金涂层光栅以及未涂层的复制品光栅基板进行了表征。未涂层和多层膜涂层光栅的均方根微观粗糙度为10 Å，金光栅的微观粗糙度为16 Å。
