Grann E B, Moharam M G
Appl Opt. 1996 Feb 10;35(5):795-800. doi: 10.1364/AO.35.000795.
The homogeneous behavior of periodic two-dimensional subwavelength surface-relief structures that contain both gratings and meshes (inverse gratings) are investigated. It is shown that when effective indices are synthesized near the higher index (substrate region), mesh structures yield larger feature sizes compared with their grating counterparts, whereas grating structures yield larger feature sizes when effective indices are synthesized near the lower index (incident region). For each type of structure investigated, a relation between the parameters of the structure and an effective refractive index is determined. It is shown that an equal area occupied by the high- or low-index media within the grating cell does not, in general, result in equal effective indices. The effective index of the grating is shown to be characterized by both the shape (local distribution) and the area of the high- or low-index medium within the unit grating cell. Finally, the advantages of subwavelength gratings and meshes are combined to produce hybrid grating-mesh structures that are less demanding on the fabrication process.
研究了包含光栅和网格(反光栅)的周期性二维亚波长表面浮雕结构的均匀行为。结果表明,当在较高折射率(衬底区域)附近合成有效折射率时,网格结构相比于其对应的光栅结构会产生更大的特征尺寸;而当在较低折射率(入射区域)附近合成有效折射率时,光栅结构会产生更大的特征尺寸。对于所研究的每种结构类型,确定了结构参数与有效折射率之间的关系。结果表明,一般而言,光栅单元内高折射率或低折射率介质所占的相等面积并不会导致相等的有效折射率。光栅的有效折射率由单位光栅单元内高折射率或低折射率介质的形状(局部分布)和面积共同表征。最后,将亚波长光栅和网格的优点结合起来,以产生对制造工艺要求较低的混合光栅 - 网格结构。