Bock Przemek J, Cheben Pavel, Schmid Jens H, Lapointe Jean, Delâge André, Janz Siegfried, Aers Geof C, Xu Dan-Xia, Densmore Adam, Hall Trevor J
Institute for Microstructural Sciences, National Research Council Canada, Ottawa, Canada.
Opt Express. 2010 Sep 13;18(19):20251-62. doi: 10.1364/OE.18.020251.
We report on the experimental demonstration and analysis of a new waveguide principle using subwavelength gratings. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Subwavelength grating waveguides in silicon-on-insulator are fabricated with a single etch step and allow for flexible control of the effective refractive index of the waveguide core simply by lithographic patterning. Experimental measurements indicate a propagation loss as low as 2.1 dB/cm for subwavelength grating waveguides with negligible polarization and wavelength dependent loss, which compares favourably to conventional microphotonic silicon waveguides. The measured group index is nearly constant n(g) ~1.5 over a wavelength range exceeding the telecom C-band.
我们报告了一种使用亚波长光栅的新型波导原理的实验演示与分析。与其他周期性波导（如二维光子晶体晶格中的线缺陷）不同，亚波长光栅波导将光限制为传统的折射率引导结构，并且不表现出光学共振行为。绝缘体上硅中的亚波长光栅波导通过单一蚀刻步骤制造，并且仅通过光刻图案化就可以灵活控制波导芯的有效折射率。实验测量表明，对于极化和波长相关损耗可忽略不计的亚波长光栅波导，其传播损耗低至2.1 dB/cm，这与传统的微光子硅波导相比具有优势。在超过电信C波段的波长范围内，测得的群折射率几乎恒定，n(g) ~1.5。
