Max Planck Institute of Microstructure Physics, Weinberg 2, Halle, Saale 06120, Germany.
Small. 2010 Dec 6;6(23):2701-7. doi: 10.1002/smll.201000169.
A flexible, nondestructive, and cost-effective replication technique for nanostructures is presented. The advantages of the process are: 1) it allows for tailoring structural parameters of the replica (e.g., line width) nearly independent of the structural geometry of the master; 2) it allows for replication of high-aspect-ratio structures also in polymer materials from solution (especially noncurable polymers) such as polystyrene and polymethylmethacrylate; 3) it includes an easy separation process, thus preserving the master for repeated use. Linear grating replicas with line widths ranging from 88 to 300 nm are obtained using a single nanostructured master. Nanofibers and complex nanopatterned replicas are achievable. The presented technique and its flexibility show that atomic layer deposition is a unique tool for the preparation of high-efficiency polarizer diffractive optics, photonics, electronics, and catalysts.
提出了一种灵活、无损且具有成本效益的复制技术，用于复制纳米结构。该工艺的优点在于：1）它允许对复制品的结构参数（例如线宽）进行定制，几乎与母版的结构几何形状无关；2）它允许在聚合物材料中复制高纵横比结构，即使是来自溶液的聚合物（特别是不可固化的聚合物），如聚苯乙烯和聚甲基丙烯酸甲酯；3）它包括一个易于分离的过程，因此可以保留母版以备重复使用。使用单个纳米结构的母版获得了线宽范围从 88nm 到 300nm 的线性光栅复制品。可以实现纳米纤维和复杂的纳米图案化复制品。所提出的技术及其灵活性表明，原子层沉积是制备高效偏振器衍射光学器件、光子学、电子学和催化剂的独特工具。
