Vrije Universiteit Brussel, Department of Chemical Engineering (Transport Modelling & Analytical Separation Science-group), Pleinlaan 2, 1040 Brussels, Belgium.
J Chromatogr A. 2010 Dec 24;1217(52):8121-6. doi: 10.1016/j.chroma.2010.10.029. Epub 2010 Oct 11.
The present study provides an overview of the ideal side-wall position in micro-pillar array columns for the case of semi-embedded side-walls. The position has been determined using computational fluid dynamics simulations of the flow field in flow domains with different side-wall shifts. Optimal side-wall shift values are presented for a wide range of shapes (cylinders, and diamonds and hexagons with different aspect ratios) and packing densities. Simple linear correlations that allow calculating the optimised side-wall geometries for the different considered variety of shapes and packing densities could be established. Interestingly, only two correlations are needed to represent all investigated cases: one correlation for all diamonds, and one correlation for the cylinders and all hexagons. Compared to the case of a flat side-wall, the minimal feature size on the mask can be increased by a factor of 2.5 in the case of cylindrical pillar bed with external porosity ɛ=0.4, implying that that much smaller pillar diameters can be used in the bulk of the bed before the minimal feature size on the mask falls below the lithography resolution.
本研究概述了半嵌入式侧壁微柱列中理想的侧壁位置。通过对具有不同侧壁位移的流场进行计算流体动力学模拟，确定了该位置。针对各种形状（圆柱、菱形和不同纵横比的六边形）和堆积密度，给出了最佳的侧壁位移值。可以建立简单的线性相关关系，用于计算不同形状和堆积密度的优化侧壁几何形状。有趣的是，仅需要两个相关关系就可以表示所有研究案例：一个相关关系用于所有菱形，另一个相关关系用于圆柱和所有六边形。与平坦侧壁相比，在外部分布率ɛ=0.4 的圆柱形柱床中，掩模上的最小特征尺寸可以增加 2.5 倍，这意味着在掩模上的最小特征尺寸低于光刻分辨率之前，可以在床体的大部分中使用小得多的柱径。
