Cardoso V F, Correia R G, Rocha J G, Lanceros-Mendez S, Minas G
University of Minho, Algoritmi Research Center, Campus de Azurém, 4800-058 Guimarães, Portugal.
Annu Int Conf IEEE Eng Med Biol Soc. 2010;2010:903-6. doi: 10.1109/IEMBS.2010.5627829.
This paper reports a fabrication method for producing piezoelectric poly (vinylidene fluoride) films in their electroactive β-phase that features controlled thickness, smooth and flat surface, and high transparency. These piezoelectric films are suitable for being used as integrated microactuators, such as piezoelectric pumps and/or mixers, in microfluidic applications. Their actuation circuit design is also reported. ATR-FTIR, UV-VIS transmittance spectroscopy and SEM techniques were used for calculating the β-phase content, for determining the transparency and for evaluating the morphology of the produced β-PVDF films, respectively. β-PVDF films with a thickness of about 25 µm were deposited by spin-coating. It was concluded that the processing parameter that mostly affect the films quality was their drying temperature. Indeed, the drying temperature of 30 °C proved to be the most suitable for obtaining non-porous and transparent films, with a β-phase content of approximately 75%.
本文报道了一种制备处于电活性β相的聚偏二氟乙烯压电薄膜的方法，该方法具有可控厚度、表面光滑平整且透明度高的特点。这些压电薄膜适用于用作微流体应用中的集成微致动器，如压电泵和/或混合器。文中还报道了它们的驱动电路设计。衰减全反射傅里叶变换红外光谱（ATR-FTIR）、紫外可见透光光谱和扫描电子显微镜（SEM）技术分别用于计算β相含量、测定透明度和评估所制备的β-PVDF薄膜的形态。通过旋涂沉积了厚度约为25μm的β-PVDF薄膜。得出的结论是，对薄膜质量影响最大的工艺参数是其干燥温度。事实上，30℃的干燥温度被证明最适合获得无孔且透明的薄膜，其β相含量约为75%。
