Lee Jihye, Choi Dae-Geun, Altun Ali Ozhan, Kim Ki-Don, Choi Jun-Hyuk, Lee Eung-Sug, Jeong Jun-Ho
Department of Nanomanufacturing Technology, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon, 305-343, Republic of Korea.
J Nanosci Nanotechnol. 2010 Sep;10(9):5680-4. doi: 10.1166/jnn.2010.2450.
This study reports the pattern definable and low cost fabrication of nanopatterned conducting polymer film on flexible substrates. Noble nanopatterned polymer hard template was fabricated by using nanoimprint lithography (NIL) and used for electropolymerization of conducting polymer. Conducting polymer was electrochemically deposited on the template and transferred over to flexible substrates. Eventually conducting polymer films with various nanopatterns were fabricated on flexible substrates. High pattern definability was achieved by nanoimprinted polymer template, which was molded from lithographically fabricated stamp. Low cost fabrication was accomplished due to low cost NIL, reusable polymer templates, and low material consumption of electrodeposition. The electrodeposited films were transferred using double sided tape. Because the templates are made of flexible polymer, the transfer bonding method applied in this study is adaptable to both wafers and flexible polymer substrates. The fabricated nanopatterned conducting polymer film can be applied to gas sensors, super capacitors, super wetting films, and neuron interfaces due to its characteristic of high surface to volume. For an illustrative application, the gas sensing properties of films were tested. The result showed enhanced sensing characteristic with nanopatterned film, which are attributed to the high surface to volume ratio of nanopatterned films.
本研究报道了在柔性基板上可定义图案且低成本制造纳米图案化导电聚合物薄膜的方法。通过纳米压印光刻(NIL)制备了贵金属纳米图案化聚合物硬模板,并将其用于导电聚合物的电聚合。导电聚合物通过电化学沉积在模板上,然后转移到柔性基板上。最终,在柔性基板上制备了具有各种纳米图案的导电聚合物薄膜。由光刻制造的印章模制而成的纳米压印聚合物模板实现了高图案可定义性。由于低成本的纳米压印光刻、可重复使用的聚合物模板以及电沉积的低材料消耗,实现了低成本制造。使用双面胶带转移电沉积的薄膜。由于模板由柔性聚合物制成,本研究中应用的转移键合方法适用于晶圆和柔性聚合物基板。所制备的纳米图案化导电聚合物薄膜因其高表面体积比的特性,可应用于气体传感器、超级电容器、超湿薄膜和神经元界面。作为一个示例性应用,测试了薄膜的气敏特性。结果表明,纳米图案化薄膜具有增强的传感特性,这归因于纳米图案化薄膜的高表面体积比。