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具有自由界面的嵌段共聚物薄膜:通过纳米图案化衬底进行有序排列。

Block copolymer films with free interfaces: ordering by nanopatterned substrates.

作者信息

Man Xingkun, Andelman David, Orland Henri

机构信息

Raymond and Beverly Sackler School of Physics and Astronomy, Tel Aviv University, Ramat Aviv 69978, Tel Aviv, Israel.

出版信息

Phys Rev E Stat Nonlin Soft Matter Phys. 2012 Jul;86(1 Pt 1):010801. doi: 10.1103/PhysRevE.86.010801. Epub 2012 Jul 12.

Abstract

We study block copolymers (BCPs) on patterned substrates, where the top polymer film surface is not constrained but is free and can adapt its shape self-consistently. In particular, we investigate the combined effect of free interface undulations with wetting of the BCP film as induced by nanopatterned substrates. Under wetting conditions and for a finite volume of BCP material, we find equilibrium droplets composed of coexisting perpendicular and parallel lamellar domains. The self-assembly of BCPs on topographic patterned substrates is also investigated and it is found that the free interface induces mixed morphologies of parallel and perpendicular domains coupled with a nonflat free interface. Our study has some interesting consequences for experimental setups of graphoepitaxy and nanoimprint lithography.

摘要

我们研究了图案化衬底上的嵌段共聚物(BCP),其中聚合物薄膜的顶部表面不受约束,是自由的,并且能够自洽地适应其形状。特别地,我们研究了纳米图案化衬底引起的自由界面起伏与BCP薄膜润湿性的综合影响。在润湿条件下且对于有限体积的BCP材料,我们发现了由共存的垂直和平行层状畴组成的平衡液滴。我们还研究了BCP在形貌图案化衬底上的自组装,发现自由界面会诱导平行和垂直畴的混合形态以及不平坦的自由界面。我们的研究对于图形外延和纳米压印光刻的实验装置有一些有趣的启示。

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