Carlie Nathan, Musgraves J David, Zdyrko Bogdan, Luzinov Igor, Hu Juejun, Singh Vivek, Agarwal Anu, Kimerling Lionel C, Canciamilla Antonio, Morichetti Francesco, Melloni Andrea, Richardson Kathleen
School of Materials Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Clemson, South Carolina 29634, USA.
Opt Express. 2010 Dec 6;18(25):26728-43. doi: 10.1364/OE.18.026728.
In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
本文详细讨论了基于硫族化物玻璃（ChG）的集成器件的特性，包括光损耗的来源以及用于减少其对光学元件性能影响的处理步骤。具体而言，介绍了利用基于溶液的玻璃加工和热回流技术来降低损耗并调整平面器件光学特性的工作，并对其结果进行了量化。利用基于硫族化物玻璃固有光敏性的制造后微调技术来补偿环形谐振器的制造缺陷。文中还介绍了工艺参数及其对提高器件制造灵活性的影响。
