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具有二维反射镜的声表面波谐振器。

A SAW resonator with two-dimensional reflectors.

机构信息

TriQuint Semiconductor, Apopka, FL, USA.

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Jan;57(1):30-7. doi: 10.1109/TUFFC.2010.1375.

Abstract

It is known that a part of the loss of leaky SAW resonators is due to radiation of acoustic energy in the bus-bars. Many researchers are working on so-called phononic crystals. A 2-D grating of very strong reflectors allows these devices to fully reflect, for a given frequency band, any incoming wave. A new device based on the superposition of a regular SAW resonator and a 2-D periodic grating of reflectors is proposed. Several arrangements and geometries of the reflectors were studied and compared experimentally on 48 degrees rotated Y-cut lithium tantalate. In particular, a very narrow aperture (7.5 lambda) resonator was manufactured in the 900 MHz range. Because of its small size, this resonator has a resonance Q of only 575 when using the standard technology, whereas a resonance Q of 1100 was obtained for the new device without degradation of the other characteristics. Because of the narrow aperture, the admittance of the standard resonator showed a very strong parasitic above the resonance frequency, whereas this effect is drastically reduced for the new device. These results demonstrate the feasibility of the new approach.

摘要

已知部分漏声表面波谐振器的损耗是由于声能在母线中的辐射。许多研究人员正在研究所谓的声子晶体。非常强的反射器的二维光栅允许这些器件在给定的频带内完全反射任何入射波。提出了一种基于规则声表面波谐振器和二维周期性反射器光栅的叠加的新器件。对反射器的几种布置和几何形状进行了研究,并在 48 度旋转钽酸锂上进行了实验比较。特别是,在 900 MHz 范围内制造了一个非常窄的孔径(7.5λ)谐振器。由于其尺寸小,当使用标准技术时,该谐振器的共振 Q 仅为 575,而对于新器件,在不降低其他特性的情况下,获得了 1100 的共振 Q。由于孔径较窄,标准谐振器的导纳在共振频率以上表现出非常强的寄生,而对于新器件,这种效应大大降低。这些结果证明了这种新方法的可行性。

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