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软 X 射线等离子体激光源对各种多层干涉镜损伤的实验研究与模拟。

Experimental study and simulation of the damage induced to various multilayer interferential mirrors by soft x-ray plasma-laser sources.

机构信息

Laboratoire de Chimie Physique, Universit� Pierre et Marie Curie, URA CNRS 176, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France.

出版信息

J Xray Sci Technol. 1997 Jan 1;7(3):271-83.

PMID:21311124
Abstract

The damage induced to various multilayer interferential mirrors (MIMs) by intense soft X-ray plasma-laser sources are studied both experimentally and theoretically. The mirrors consist of periodic bilayers made up with C/W, Si/Mo, Si/W. One set of Si/W MIMs is coated with a 100 nm Si film devised to protect the multilayer structure. In the experiment, one resolves in time the evolution of the diffraction pattern of a MIM illuminated by the radiation of a NaCl probing laser-plasma and exposed to the heating radiation emitted by a gold laser-plasma. One measures the damage threshold time and the damage threshold fluence. Simulations are performed by combining an optical code with a Lagrangian thermomechanical code giving at each time the density and the thickness of each layer in the MIM.

摘要

研究了强软 X 射线等离子体激光源对各种多层干涉镜(MIM)的损伤,实验和理论两方面都进行了研究。这些镜子由周期性的双层结构组成,由 C/W、Si/Mo、Si/W 组成。一组 Si/W MIM 涂有 100nm 的 Si 薄膜,旨在保护多层结构。在实验中,通过探测激光等离子体的 NaCl 激光辐射照射和加热辐射暴露,观察 MIM 的衍射图案随时间的演化。测量损伤阈值时间和损伤阈值通量。通过将光学代码与拉格朗日热力代码相结合进行模拟,该代码在每个时间点给出 MIM 中每层的密度和厚度。

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