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基于 site-specific 的多阶段 CVD 法制备大规模 ZnO 纳米棒阵列。

Site-specific multi-stage CVD of large-scale arrays of ultrafine ZnO nanorods.

机构信息

Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, People's Republic of China.

出版信息

Nanotechnology. 2011 Apr 1;22(13):135603. doi: 10.1088/0957-4484/22/13/135603. Epub 2011 Feb 22.

DOI:10.1088/0957-4484/22/13/135603
PMID:21343640
Abstract

Multi-stage growth of ZnO nanorod arrays has been carried out by Au-assisted chemical vapor deposition (CVD) in order to better understand and more precisely control the growth behaviors. It is evidenced that Au-catalyzed vapor-liquid-solid (VLS) growth only dominates the initial site-specific nucleation of the nanorods, while the subsequent growth is governed by a vapor-solid (VS) epitaxy mechanism. The sequential VLS and VS behaviors permit the fabrication of large-scale highly ordered arrays of ZnO nanorods with precisely tunable diameters and embedded junctions by controlling reactant concentration and nanorod top morphology. Based on the above results, two routes to fabricate ultrafine ZnO nanorod arrays are proposed and stepwise nanorod arrays with ultrafine top segment (~10 nm in diameter) have been achieved. Temperature-dependent photoluminescence (PL) and spatial resolved PL were carried out on the nanorod arrays and on individual nanorods, indicating high quality optical properties and tunable light emission along the length of the stepwise nanorods.

摘要

通过 Au 辅助化学气相沉积(CVD)进行了 ZnO 纳米棒阵列的多步生长,以便更好地理解和更精确地控制生长行为。有证据表明,Au 催化的气-液-固(VLS)生长仅主导纳米棒的初始局域成核,而随后的生长则由气-固(VS)外延机制控制。顺序的 VLS 和 VS 行为允许通过控制反应物浓度和纳米棒顶部形态来制造具有精确可调直径和嵌入式结的大规模高度有序的 ZnO 纳米棒阵列。基于上述结果,提出了两种制造超细 ZnO 纳米棒阵列的方法,并通过控制反应物浓度和纳米棒顶部形貌,实现了具有超细顶部段(~10nm 直径)的分步纳米棒阵列。对纳米棒阵列和单个纳米棒进行了温度相关的光致发光(PL)和空间分辨 PL 测量,表明具有高质量的光学性能和沿分步纳米棒长度可调的发光。

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