采用带硅通孔的两轴微机电扫描镜的微型内窥镜光学相干断层扫描探头。

Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias.

机构信息

University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611-6130, USA.

出版信息

J Biomed Opt. 2011 Feb;16(2):026006. doi: 10.1117/1.3533323.

Abstract

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ± 16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

摘要

我们提出了一种新的基于 MEMS 的内窥镜光学相干断层扫描（OCT）探头的设计和实验结果。这种微型 OCT 成像探头的独特之处在于采用了带有硅通孔（TSV）的两轴 MEMS 反射镜进行互连。这种 TSV 互连实现了超紧凑的探头设计，成功地将探头尺寸缩小到仅 2.6 毫米直径。MEMS 反射镜由一个电热致动器驱动，该致动器能够在仅 3.6 V DC 的电压下扫描±16°。在时域 OCT 系统中，使用这种微型探头获得了嵌入 PDMS 中的微球和急性大鼠脑组织的二维和三维 OCT 图像。