Lin Yung-Hsiang, Wu Chung-Lun, Pai Yi-Hao, Lin Gong-Ru
Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan.
Opt Express. 2011 Mar 28;19(7):6563-70. doi: 10.1364/OE.19.006563.
A 24-pair Si-rich SiNx/SiOx-based distributed Bragg reflector (DBR) architecture, in situ doped with Si nanocrystals (Si-ncs), is studied to show self-photoluminescence (PL) with narrow-linewidth green-color emission pattern. By cascaded depositing, the broadband luminescent SiNx/SiOx pairs with SiNx and SiOx layer thickness of 45 and 86 nm and corresponding refractive indices of 1.96 and 1.62, respectively, and the transmitted PL linewidth of the in situ Si-nc-doped DBR emitter/filter centered at a wavelength of 533 nm greatly reduces from 150 to 10 nm, which is achieved by blocking the UV and blue luminescence at 400-510 nm with the DBR filter bandwidth up to 95 nm. A multilayer DBR modeling is established to simulate the transmitted PL from the summation of each emissive SiNx/SiOx pair, providing a coincident PL shape with a spectral linewidth of 15 nm.
研究了一种原位掺杂硅纳米晶体（Si-ncs）的基于24对富硅SiNx/SiOx的分布式布拉格反射器（DBR）结构，以展示具有窄线宽绿色发射图案的自发光（PL）。通过级联沉积，SiNx和SiOx层厚度分别为45和86 nm、相应折射率分别为1.96和1.62的宽带发光SiNx/SiOx对，以及原位掺杂Si-nc的DBR发射器/滤波器在波长533 nm处的透射PL线宽从150 nm大幅减小至10 nm，这是通过具有高达95 nm的DBR滤波器带宽阻挡400 - 510 nm处的紫外和蓝色发光实现的。建立了多层DBR模型，以模拟每个发射性SiNx/SiOx对的总和产生的透射PL，提供了一个光谱线宽为15 nm的一致PL形状。
