Modeling scanning probe microscope lateral dynamics using the probe-surface interaction signal.

In this paper, a novel scanning probe microscope (SPM) modeling technique is presented. The novelty of this technique is that it exploits the SPM's probe-surface interaction measurement capabilities [e.g., the topography signal in atomic force microscopy (AFM)] to determine the SPM's lateral positioning dynamics. SPM operation speed is limited due to mechanical vibrations induced by movement of the SPM nanopositioner. In order to facilitate high-speed SPM operation, the dynamics of the SPM can be modeled and used to design feedforward and feedback controllers that reduce nanopositioner vibrations. The proposed technique seeks to develop a transfer function model of the SPM dynamics using only the SPM probe-surface interaction signal obtained while scanning a calibration sample. The technique is presented in the context of an AFM example, errors associated with the method are analyzed, and the method is experimentally verified using a commercial AFM. Experimental modeling results show that the method is capable of modeling the dynamics of SPM systems.