扫描探针显微镜用纳米探针的仿真辅助设计与制作。

Simulation-aided design and fabrication of nanoprobes for scanning probe microscopy.

机构信息

Department of Materials Science and Engineering, National Cheng Kung University, Taiwan, ROC.

出版信息

Ultramicroscopy. 2011 Apr;111(5):337-41. doi: 10.1016/j.ultramic.2011.01.025. Epub 2011 Jan 26.

DOI:10.1016/j.ultramic.2011.01.025

Abstract

We proposed and demonstrated a flexible and effective method to design and fabricate scanning probes for atomic force microscopy applications. Computer simulations were adopted to evaluate design specifications and desired performance of atomic force microscope (AFM) probes; the fabrication processes were guided by feedback from simulation results. Through design-simulation-fabrication iterations, tipless cantilevers and tapping mode probes were successfully made with errors as low as 2% in designed resonant frequencies. For tapping mode probes, the probe tip apex achieved a 10nm radius of curvature without additional sharpening steps; tilt-compensated probes were also fabricated for better scanning performance. This method provides AFM users improved probe quality and practical guidelines for customized probes, which can support the development of novel scanning probe microscopy (SPM) applications.

摘要

我们提出并展示了一种灵活有效的方法来设计和制造原子力显微镜（AFM）应用的扫描探针。采用计算机模拟来评估 AFM 探针的设计规格和预期性能；通过模拟结果的反馈来指导制造过程。通过设计-模拟-制造的迭代，成功制造出了无尖端悬臂梁和敲击模式探针，其设计谐振频率的误差低至 2%。对于敲击模式探针，无需额外的锐化步骤，探针尖端顶点就达到了 10nm 的曲率半径；还制造了倾斜补偿探针，以获得更好的扫描性能。这种方法为 AFM 用户提供了改进的探针质量和定制探针的实用指南，这可以支持新型扫描探针显微镜（SPM）应用的发展。