光学用混合氧化物涂层。

Mixed oxide coatings for optics.

作者信息

Stenzel Olaf, Wilbrandt Steffen, Schürmann Mark, Kaiser Norbert, Ehlers Henrik, Mende Mathias, Ristau Detlev, Bruns Stefan, Vergöhl Michael, Stolze Markus, Held Mario, Niederwald Hansjörg, Koch Thomas, Riggers Werner, Burdack Peer, Mark Günter, Schäfer Rolf, Mewes Stefan, Bischoff Martin, Arntzen Markus, Eisenkrämer Frank, Lappschies Marc, Jakobs Stefan, Koch Stephan, Baumgarten Beate, Tünnermann Andreas

机构信息

Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany.

出版信息

Appl Opt. 2011 Mar 20;50(9):C69-74. doi: 10.1364/AO.50.000C69.

DOI:10.1364/AO.50.000C69

PMID:21460985

Abstract

Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UV applications have been deposited by PIAD.

摘要

材料混合物为合成具有定制光学和机械性能的涂层材料提供了新的可能性。我们展示了关于HfO2、ZrO2和Al2O3混合物的实验结果，旨在将其应用于紫外涂层技术，这些混合物是通过磁控溅射、离子束溅射、等离子体离子辅助沉积（PIAD）以及无辅助的电子束蒸发制备的。所研究的性能包括折射率、光学带隙、热位移和机械应力。首个用于紫外应用的高反射镜已通过PIAD沉积。