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由铁电-金属异质结构制成的微光探测器。

Micro Photo Detector Fabricated of Ferroelectric-Metal Heterostructure.

作者信息

Zomorrodian A, Wu N J, Song Y, Stahl S, Ignatiev A, Trexler E Brady, Garcia C A

机构信息

Texas Center for Superconductivity and Advanced Materials, University of Houston, Houston, TX 77204-5004, U.S.A.

出版信息

Jpn J Appl Phys Pt 1. 2005 Sep;44(2005):6105-6108. doi: 10.1143/JJAP.44.6105.

DOI:10.1143/JJAP.44.6105
PMID:21472042
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3070395/
Abstract

The anomalous photovoltaic effect (APE) in ferroelectric thin films has been utilized for the development of an optical micro-detector active in the visible range (from 350 to 800 nm). La-doped Pb(Zr,Ti)O(3) (PLZT) ferroelectric films epitaxially grown on Pt(001)/Mg(001) substrate were fabricated into micro-detector arrays and characterized as to their optical response. The Au/PLZT/Pt/MgO device was self-polarized in the as-deposited form with the polarization vector perpendicular to film surface. The heterostructure photovoltage response ranged from 100 to 200 mV, and the photocurrent was ~30 nA/cm(2) for devices of ~250 μm diameter under illumination of 100 mW/cm(2) at wavelengths from 400 to 580 nm. Such micro-detectors can be used for optical sensors in MEMS devices as well as for electrical stimulators of biological cells.

摘要

铁电薄膜中的反常光伏效应(APE)已被用于开发在可见光范围(350至800纳米)内工作的光学微探测器。在Pt(001)/Mg(001)衬底上外延生长的La掺杂Pb(Zr,Ti)O(3)(PLZT)铁电薄膜被制成微探测器阵列,并对其光学响应进行了表征。Au/PLZT/Pt/MgO器件在沉积态时自发极化,极化矢量垂直于薄膜表面。对于直径约250μm的器件,在波长为400至580nm、光照强度为100mW/cm(2)的条件下,异质结构光电压响应范围为100至200mV,光电流约为30nA/cm(2)。这种微探测器可用于MEMS器件中的光学传感器以及生物细胞的电刺激器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/30f424daa77d/nihms41429f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/2ccd3d75f534/nihms41429f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/220057788913/nihms41429f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/9324858ee180/nihms41429f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/394b65106d55/nihms41429f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/ef2606b6e1f9/nihms41429f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/30f424daa77d/nihms41429f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/2ccd3d75f534/nihms41429f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/220057788913/nihms41429f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/9324858ee180/nihms41429f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/394b65106d55/nihms41429f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/ef2606b6e1f9/nihms41429f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d1ee/3070395/30f424daa77d/nihms41429f6.jpg

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