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无胶金图案转移至基于 PDMS 的纳米复合介电层用于印刷高性能有机薄膜晶体管。

Adhesive-free transfer of gold patterns to PDMS-based nanocomposite dielectric for printed high-performance organic thin-film transistors.

机构信息

Center for Advanced Bionanosystems School of Chemical and Biomedical Engineering, Nanyang Technological University, 70 Nanyang Drive, 637457 Singapore.

出版信息

ACS Appl Mater Interfaces. 2011 Jun;3(6):1880-6. doi: 10.1021/am200058b. Epub 2011 May 11.

DOI:10.1021/am200058b
PMID:21534573
Abstract

Low-cost, adhesive-free direct transfer of gold patterns onto PDMS-based nanocomposite dielectric layer was investigated to significantly improve contact resistance at electrode-semiconductor interface in organic thin-film transistors (OTFTs). In particular, the nanocomposite film made from PDMS and solution-processable titanium dioxide nanoparticles was applied as dielectric layer in OTFTs, while transfer of gold patterns with a resolution lower than 3 μm is realized without use of any adhesive but through increased adhesion between gold and nanocomposite film of higher thickness and dielectric constant formed by in situ PDMS cross-linking process. Dielectric constant of the nanocomposite shows a dependence on the ratio of titanium dioxide nanoparticles to PDMS and the dielectric thickness was optimized for the best transfer efficiency. The organic transistors fabricated by this process demonstrate a high mobility of 0.038 cm(2)/(V s) and on/off ratio of 1 × 10(4) to 1 × 10(5). The electrode-semiconductor interface is evaluated by transmission line model to have width-normalized contact resistance of ∼100 kΩ cm while the inert property of dielectric-semiconductor interface gives low hysteresis (ΔV(th) = 1.2 V) and low threshold voltage (V(th) = -1.3 V) in the devices. This process can be readily adapted into a low-cost mass manufacturing process for printed organic electronics.

摘要

低成本、无胶的直接转移金图案到基于 PDMS 的纳米复合材料电介质层上,以显著改善有机薄膜晶体管 (OTFT) 中电极-半导体界面的接触电阻。特别是,由 PDMS 和可溶液处理的二氧化钛纳米粒子制成的纳米复合薄膜用作 OTFT 的介电层,而无需使用任何粘合剂,即可实现分辨率低于 3 μm 的金图案转移,这是通过增加金与原位 PDMS 交联过程形成的更高厚度和介电常数的纳米复合材料之间的附着力来实现的。纳米复合材料的介电常数取决于二氧化钛纳米粒子与 PDMS 的比例,并且优化了介电厚度以获得最佳的转移效率。通过这种工艺制造的有机晶体管表现出 0.038 cm2/(V s)的高迁移率和 1×104 到 1×105 的开/关比。通过传输线模型评估电极-半导体界面,得到宽度归一化接触电阻约为 100 kΩ cm,而介电-半导体界面的惰性性质使器件中的滞后(ΔVth = 1.2 V)和阈值电压(Vth = -1.3 V)较低。该工艺可以很容易地适应于低成本的大规模制造工艺,用于印刷有机电子。

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