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Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers.

作者信息

Frigeri Cesare, Serényi Miklós, Khánh Nguyen Quoc, Csik Attila, Riesz Ferenc, Erdélyi Zoltán, Nasi Lucia, Beke Dezső László, Boyen Hans-Gerd

机构信息

CNR-IMEM Institute, Parco Area delle Scienze 37/A, 43100 Parma, Italy.

出版信息

Nanoscale Res Lett. 2011 Mar 1;6(1):189. doi: 10.1186/1556-276X-6-189.

DOI:10.1186/1556-276X-6-189
PMID:21711697
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3211242/
Abstract

Hydrogenated multilayers (MLs) of a-Si/a-Ge have been analysed to establish the reasons of H release during annealing that has been seen to bring about structural modifications even up to well-detectable surface degradation. Analyses carried out on single layers of a-Si and a-Ge show that H is released from its bond to the host lattice atom and that it escapes from the layer much more efficiently in a-Ge than in a-Si because of the smaller binding energy of the H-Ge bond and probably of a greater weakness of the Ge lattice. This should support the previous hypothesis that the structural degradation of a-Si/a-Ge MLs primary starts with the formation of H bubbles in the Ge layers.

摘要

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引用本文的文献

1
On the formation of blisters in annealed hydrogenated a-Si layers.退火氢化非晶硅层中水疱的形成。
Nanoscale Res Lett. 2013 Feb 15;8(1):84. doi: 10.1186/1556-276X-8-84.

本文引用的文献

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Origin of compressive residual stress in polycrystalline thin films.多晶薄膜中压缩残余应力的起源。
Phys Rev Lett. 2002 Apr 15;88(15):156103. doi: 10.1103/PhysRevLett.88.156103. Epub 2002 Mar 29.
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