Department of Advanced Materials and Structures, Centre de Recherche Public Henri Tudor, L-4002 Esch-sur-Alzette, Luxembourg.
Micron. 2011 Dec;42(8):877-83. doi: 10.1016/j.micron.2011.06.004. Epub 2011 Jun 15.
Gas impact on the EDS profile resolution at the interface of composite interface resin/Al was investigated with two gaseous environments: helium and water vapor. Two main components of the global profile at the interface were investigated: the contrast of the profile and the spatial resolution. A complementary approach was developed by comparing gas nature impact versus the pressure and versus the scattering regime. The results show that the unscattered electron beam mainly governs EDS profile spatial resolution as long as the scattering regime is single or oligo scattering. Then for plural scattering, spatial resolution is dramatically degraded. In addition, the contrast is degraded since a gas is introduced, whatever the gas, the pressure and so the scattering regime. This approach would enable to better understand the respective contributions of the unscattered beam and the skirt and the influence of the gases nature on them.
研究了两种气体环境（氦气和水蒸气）对复合材料界面树脂/Al 界面 EDS 谱线分辨率的气体影响。研究了界面处总轮廓的两个主要组成部分：轮廓对比度和空间分辨率。通过比较气体性质对压力和散射状态的影响，开发了一种补充方法。结果表明，只要散射状态是单散射或寡散射，未散射电子束主要控制 EDS 谱线空间分辨率。然后对于多散射，空间分辨率会急剧下降。此外，无论气体、压力和散射状态如何，引入气体都会降低对比度。这种方法将有助于更好地理解未散射光束和裙边的各自贡献以及气体性质对它们的影响。
