Univ-Lille Nord de France, Ecole des Mines de Douai, 941, rue Charles Bourseul BP 10838, 59500 Douai, France.
Micron. 2013 Mar;46:12-21. doi: 10.1016/j.micron.2012.11.003. Epub 2012 Nov 23.
A validation of our recent new approach is presented here in order to better interpret the EDS analysis results in low vacuum SEM. This approach is based on correlation between two concepts: the electron beam skirt radius in the gas characterized by RS and the X-ray emission volume radius in the material characterized by RX. If RS≤RX; then the skirt impact on the analysis is null and the best possible X-ray lateral resolution within the limitations imposed by gas scattering is obtained. In order to follow the relationship between RS and RX, two aluminum foils with different thickness (2 μm and 20 μm) embedded separately in epoxy resin were used. The results showed the existence of the optimal experimental conditions depending on the pressure and the energy that verify the condition of RS≤RX. The experimental and simulated results show the great consistency of this approach.
为了更好地解释低真空扫描电镜中 EDS 分析结果，我们提出了一种验证我们最近新方法的方案。该方法基于两个概念之间的相关性：由 RS 描述的气体中的电子束裙边半径，以及由 RX 描述的材料中的 X 射线发射体积半径。如果 RS≤RX，则裙边对分析的影响为零，可以获得气体散射所限制的最佳可能的 X 射线横向分辨率。为了跟踪 RS 和 RX 之间的关系，我们分别在环氧树脂中嵌入了两片不同厚度（2μm 和 20μm）的铝箔。结果表明，存在依赖于压力和能量的最佳实验条件，验证了 RS≤RX 的条件。实验和模拟结果表明，该方法具有很好的一致性。
