Hafsi Z, Mansour O, Kadoun A, Khouchaf L, Mathieu C
L2MSM Laboratory, Physics Department, Faculty of Exact Sciences, Djilali Liabes University BP.89 Sidi Bel-Abbes 22000, Algeria.
L2MSM Laboratory, Physics Department, Faculty of Exact Sciences, Djilali Liabes University BP.89 Sidi Bel-Abbes 22000, Algeria..
Ultramicroscopy. 2018 Jan;184(Pt A):17-23. doi: 10.1016/j.ultramic.2017.08.002. Epub 2017 Aug 12.
The effect of the electron beam skirting on the emission and detection of the backscattered electrons (BSE) in a low vacuum scanning electron microscope is investigated at low energy regime. Monte Carlo computed dependencies of the BSE distribution on the water vapor and air pressure shown a significant increase of the extent of the BSE exit zone. The pressure variation has however a little effect when helium gas is used. A new approach based on the comparison between the sizes of the skirt and the BSE exit zone on the specimen surface provides a useful tool to determine the operating pressure range that ensures minimal degradation of the lateral resolution in BSE imaging mode.
在低能状态下，研究了低真空扫描电子显微镜中电子束边缘对背散射电子（BSE）发射和检测的影响。蒙特卡洛计算得出的BSE分布与水蒸气和气压的相关性表明，BSE出射区域的范围显著增加。然而，当使用氦气时，压力变化的影响较小。一种基于比较样品表面边缘尺寸和BSE出射区域大小的新方法，为确定操作压力范围提供了一个有用的工具，该压力范围可确保BSE成像模式下横向分辨率的最小退化。
