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飞秒激光在偏振控制的双色双脉冲辐照下在硅上诱导产生的周期性表面结构。

Femtosecond laser-induced periodic surface structures on silicon upon polarization controlled two-color double-pulse irradiation.

作者信息

Höhm Sandra, Herzlieb Marcel, Rosenfeld Arkadi, Krüger Jörg, Bonse Jörn

出版信息

Opt Express. 2015 Jan 12;23(1):61-71. doi: 10.1364/OE.23.000061.

DOI:10.1364/OE.23.000061
PMID:25835654
Abstract

Two-color double-fs-pulse experiments were performed on silicon wafers to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS). A Mach-Zehnder interferometer generated parallel or cross-polarized double-pulse sequences at 400 and 800 nm wavelength, with inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Multiple two-color double-pulse sequences were collinearly focused by a spherical mirror to the sample. The resulting LIPSS characteristics (periods, areas) were analyzed by scanning electron microscopy. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS. These two-color experiments extend previous single-color studies and prove the importance of the ultrafast energy deposition for LIPSS formation.

摘要

在硅片上进行了双色双飞秒脉冲实验,以研究激光诱导周期性表面结构(LIPSS)形成过程中的时间分布能量沉积。马赫-曾德尔干涉仪产生波长为400和800 nm的平行或交叉偏振双脉冲序列,在亚消融50飞秒脉冲之间的脉冲间延迟可达几皮秒。多个双色双脉冲序列通过球面镜共线聚焦到样品上。通过扫描电子显微镜分析所得的LIPSS特性(周期、面积)。提出了一种波长相关的等离子体机制来解释LIPSS的延迟依赖性。这些双色实验扩展了先前的单色研究,并证明了超快能量沉积对LIPSS形成的重要性。

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Multi-photon absorption enhancement by dual-wavelength double-pulse laser irradiation for efficient dicing of sapphire wafers.双波长双脉冲激光辐照的多光子吸收增强,用于高效划片蓝宝石晶圆。
Sci Rep. 2017 Jul 12;7(1):5218. doi: 10.1038/s41598-017-05548-x.