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用超短激光脉冲对硼掺杂金刚石薄膜进行表面纳米纹理化处理

Surface Nanotexturing of Boron-Doped Diamond Films by Ultrashort Laser Pulses.

作者信息

Mastellone Matteo, Bolli Eleonora, Valentini Veronica, Orlando Stefano, Lettino Antonio, Polini Riccardo, Buijnsters Josephus Gerardus, Bellucci Alessandro, Trucchi Daniele Maria

机构信息

CNR-ISM, DiaTHEMA Lab, U.O.S. Montelibretti, Via Salaria km 29.300, 00015 Monterotondo, Italy.

CNR-ISM, FemtoLAB, U.O.S. Tito Scalo, Zona Industriale, 85050 Tito, Italy.

出版信息

Micromachines (Basel). 2023 Feb 4;14(2):389. doi: 10.3390/mi14020389.

DOI:10.3390/mi14020389
PMID:36838089
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9959392/
Abstract

Polycrystalline boron-doped diamond (BDD) films were surface nanotextured by femtosecond pulsed laser irradiation (100 fs duration, 800 nm wavelength, 1.44 J cm single pulse fluence) to analyse the evolution of induced alterations on the surface morphology and structural properties. The aim was to identify the occurrence of laser-induced periodic surface structures (LIPSS) as a function of the number of pulses released on the unit area. Micro-Raman spectroscopy pointed out an increase in the graphite surface content of the films following the laser irradiation due to the formation of ordered carbon sites with respect to the pristine sample. SEM and AFM surface morphology studies allowed the determination of two different types of surface patterning: narrow but highly irregular ripples without a definite spatial periodicity or long-range order for irradiations with relatively low accumulated fluences (<14.4 J cm) and coarse but highly regular LIPSS with a spatial periodicity of approximately 630 nm ± 30 nm for higher fluences up to 230.4 J cm.

摘要

通过飞秒脉冲激光辐照(持续时间100飞秒、波长800纳米、单脉冲能量密度1.44焦耳/平方厘米)对多晶掺硼金刚石(BDD)薄膜进行表面纳米结构化处理,以分析表面形态和结构特性的诱导变化的演变。目的是确定激光诱导周期性表面结构(LIPSS)的出现与单位面积上释放的脉冲数之间的关系。显微拉曼光谱表明,与原始样品相比,由于有序碳位点的形成,激光辐照后薄膜的石墨表面含量增加。扫描电子显微镜(SEM)和原子力显微镜(AFM)表面形态研究确定了两种不同类型的表面图案:对于累积能量密度相对较低(<14.4焦耳/平方厘米)的辐照,出现狭窄但高度不规则的波纹,没有确定的空间周期性或长程有序;对于高达230.4焦耳/平方厘米的较高能量密度,出现粗糙但高度规则的LIPSS,空间周期性约为630纳米±30纳米。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/0ff8491c4488/micromachines-14-00389-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/2033f52f9e88/micromachines-14-00389-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/c1c5c31b432c/micromachines-14-00389-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/541709e35a50/micromachines-14-00389-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/4c30438453cf/micromachines-14-00389-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/3afa5f811780/micromachines-14-00389-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/2c797434e075/micromachines-14-00389-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/dce4af3e461b/micromachines-14-00389-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/740e58146eda/micromachines-14-00389-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/0ff8491c4488/micromachines-14-00389-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/2033f52f9e88/micromachines-14-00389-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/c1c5c31b432c/micromachines-14-00389-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/541709e35a50/micromachines-14-00389-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/4c30438453cf/micromachines-14-00389-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/3afa5f811780/micromachines-14-00389-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/2c797434e075/micromachines-14-00389-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/dce4af3e461b/micromachines-14-00389-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/740e58146eda/micromachines-14-00389-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cfeb/9959392/0ff8491c4488/micromachines-14-00389-g009.jpg

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