Wang Weibo, Tan Jiubin, Wang Tong, Li Meiyu, Tang Jianbo
Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China.
Appl Opt. 2011 Jul 10;50(20):3482-7. doi: 10.1364/AO.50.003482.
We propose an even-/odd-synthesis method for the elimination of additional aberration caused by misalignment or environmental vibration during the calibration of a Fizeau interferometer reference surface (RS). The odd and even parts of an RS can be obtained, because surface errors could be divided into rotationally symmetric and nonrotationally symmetric terms. We then propose a least-squares algorithm with a dual-objective optimization function for calibration of the measurement results at the confocal position. Finally, a complete RS can be eventually obtained by synthesizing the odd and even parts of the RS. It has been verified through experiments that the measurement repeatability of the PV value is better than 0.003λ, and the root-mean-square value is better than 0.0003λ.
我们提出了一种奇偶合成方法，用于消除在斐索干涉仪参考面（RS）校准过程中由未对准或环境振动引起的额外像差。由于表面误差可分为旋转对称项和非旋转对称项，因此可以获得RS的奇数部分和偶数部分。然后，我们提出了一种具有双目标优化函数的最小二乘算法，用于校准共焦位置的测量结果。最后，通过合成RS的奇数部分和偶数部分最终可以得到完整的RS。实验验证了PV值的测量重复性优于0.003λ，均方根值优于0.0003λ。
