Schreiner R, Schwider J, Lindlein N, Mantel K
Jenoptik Laser, Optik, Systeme GmbH, Goeschwitzer Strasse 25, D-07745 Jena, Germany.
Appl Opt. 2008 Nov 10;47(32):6134-41. doi: 10.1364/ao.47.006134.
Absolute testing of spherical surfaces is a technological necessity because of increased accuracy requirements. In a Fizeau setup, the main part of the interferometer deviations thereby comes from the reference surface. We demonstrate the validity of an absolute testing procedure for the reference surface that has been proposed earlier. The procedure relies on the decomposition of the surface deviations into odd and even parts and could be used in partially coherent illumination. The odd deviations are obtained from a basic and a 180 degree-rotated position of an auxiliary sphere, and the even deviations can be measured with the help of a cat's eye position in double pass using an opaque half screen in the interferometer aperture.
由于精度要求的提高，球面的绝对检测成为一项技术需求。在斐索装置中，干涉仪偏差的主要部分由此来自参考表面。我们证明了先前提出的参考表面绝对检测程序的有效性。该程序依赖于将表面偏差分解为奇数和偶数部分，并且可用于部分相干照明。奇数偏差是从辅助球体的基本位置和旋转180度的位置获得的，偶数偏差可以在双程中借助猫眼位置通过在干涉仪孔径中使用不透明半屏来测量。
